Compenstation scheme for the voltage droop of solid-state marx modulators

ABSTRACT

A novel design scheme for the compensation circuitry of solid-state Marx modulators has been described for enhancing the compensation ability of the compensation cells of solid-state Marx modulators and simplifying the entire circuitry of the modulator. High-speed solid-state switches are adopted in the new compensation cell for the control of the compensation actions. Inductive components and diodes are adopted in the design scheme to smooth the flattop of the voltage pulse output by the Marx modulator.

GOVERNMENT RIGHTS

This invention was made with government support under Grant No.DE-FG02-08ER85052 awarded by the U.S. Energy Department. The governmentmay have certain rights in the invention.

BACKGROUND OF THE INVENTION

1. Field of the Invention

This invention comprises a new design scheme for a compensationcircuitry for the output voltage pulse of a solid-state Marx modulator.Specifically, design and utilization methods of high voltagecompensation cells (HVCCs) are introduced into a high-voltagesolid-state Marx modulator for counteracting the voltage droop of itsoutput pulse when the Marx modulator is used in high-power andlong-pulse applications. Inductive components regulated by solid-stateswitches are used in the HVCCs for reliably compensating the voltagedroop of the long output pulse (around millisecond order) of the Marxmodulator. The invention is also applicable to solid-state Marx pulsersthat have a large voltage droop in output voltage pulses.

2. Description of Prior Art

A Marx generator is a device to transform a low charge voltage to a highoutput voltage pulse. It is a robust, low-impedance source of electricenergy that has been utilized in a variety of high-peak-powerapplications for the past several decades. In recent years, Marxgenerators using new solid-state switches, e.g. Metal OxideSemiconductor Field Effect Transistors (MOSFET) and Insulated GateBipolar Transistor (IGBT), have been studied for the application of highvoltage modulators. This type of modulators, called solid-state Marxmodulators or Marx modulators in short, offers an alternative totraditional high voltage (HV) modulators for rf power sources. Theirmerits are compact size, high-energy efficiency, high reliability, pulsewidth control and cost reduction. The use of solid-state switches withelectrical current interruption capability, in place of spark gapswitches or Silicon-Controlled Rectifier (SCR) switches, gives Marxmodulators the ability to produce square-shaped output pulses at highrepetition rates, and allows the output pulse to change width from onepulse to the next, a capability that gives Marx modulators the abilityto adapt rapidly to changing load requirements.

Ideally, the high voltage output pulse by the Marx modulator should havea constant amplitude (or flat pulse) in rf applications. There is nointrinsic limitation for the Marx modulator to generate a flat pulse ifits output voltage pulse is short or if the resistance of the Marxmodulator's load is high so that their circuit's time constant is muchlonger than the pulse length. However, a great challenge appears if theMarx modulator has a long output pulse or a small load. The outputvoltage droops significantly in the latter cases because, whendischarging, a Marx modulator can be approximated by a simple capacitorhaving the capacitance of C_(m), if parasitic inductance is small, withthe load represented by a resistance R_(L). The entire modulator circuittogether with its load, e.g. a klystron or a magnetron, is a simpledischarging RC circuit with a time-constant t=C_(m)·R_(L), whichdetermines the severity of the voltage droop at the end of a voltagepulse. A reduction in the time constant or an increase of the voltagepulse duration would lead to a significant voltage reduction at the endof a long voltage pulse, which is generally not acceptable for an rfload such as a klystron. To limit the voltage droop in a narrow rangethat is required by the load, designers of the Marx modulator need toincrease the time-constant t. Since the load is normally not changeable,the total capacitance, C_(m), of the Marx modulator need to be increaseddramatically, which is equivalent to increasing the total storedelectrical energy of the Marx modulator and will incur a great amount ofexpense.

To circumvent this problem, researchers tried to exploit compensationcircuitry to reduce the voltage droop of the Marx modulators in recentyears. The prior art compensation circuitry, named vernier regulator orVC bank, consists of tens of compensation cells (CCs), called verniercells (VCs) (see papers of G. Leyh, 2005 Pulsed Power Conference,Particle Accelerator Conference 2007 and C. Burkhart, Proceedings ofLINAC 2008). These prior art CCs, i.e. VCs, have a similar topology tothat of the Marx cells (MCs) within same Marx modulator, but have muchlower charge voltage than that of the MCs (see papers of C. Burkhart,Proceedings of LINAC 2008, and G. Leyh, 2005 Pulsed Power Conference,European Particle Accelerator Conference 2004). Therefore, the voltagerating of the components of the VCs is generally much lower than theircounterpart in MCs.

For the purpose of discussing the differences between our invention andprior arts, we display a topology of a MC described in above citationsin FIG. 1, which has a similar topology to a prior art CC or VC. Thecharging circuit for the cells is represented by a solid-state chargeswitch only in FIG. 1, omitting other details in order to highlight thecore function of the cell. Isolated switch drives are included in thefigure because they are necessary for the solid-state switches exploitedby Marx modulators. In this prior art topology, the MC or VC comprisesof charge switch 16 together with its isolated switch drive 22 (alsocalled isolated gate drive; same for other isolated switch drives),bypass diode 18, main switch 12 together with its isolated switch drive20, and energy storage capacitor 14. Bypass diode 18 defaults thecurrent cell if main switch 12 is off during pulse output period.Isolated switch drive 20 and 22 accept the control signals from acontrol system of the Marx modulator. When charging, main switch 12 isoff and charge switch 16 is on. Charge current passes through chargeswitch 16 to charge energy storage capacitor 14 that is in the next MCin series. During operation, charge switch 16 is turned off while mainswitch 12 is turned on by the control system through their individualisolated switch drives. Electric energy stored in energy storagecapacitor 14 is released to the Marx modulator's load.

When working in a Marx modulator, prior art VCs with the topology inFIG. 1 are turned on one-by-one within the specified pulse duration.Their output voltages are superposed on the negative output voltage ofthe MC bank, comprising tens of MCs in series, so that the voltage droop(referring to voltage amplitude droop, same meaning below) of the MCbank is compensated. The advantage of using a compensation circuitry ina high voltage modulator is that the Marx modulator can greatly reducethe stored electric energy in the capacitors of its MC bank while stilllimiting its pulsed voltage droop to the specified range required by therf load. However, problems exist in these compensation cell designs.First, the output voltage of the compensation cells, i.e. the VCsmentioned above, in series of the MC bank of the Marx modulatorssuperposes on the output voltage of the MC bank, and forms sawtoothshapes (see paper of C. Burkhart, Proceedings of LINAC 2008) on theoutput voltage pulse of the entire Marx modulator. The charge voltage ofeach of the VCs must be lowered in order to control the sawtooth height,necessitating a large difference between the charge voltage of a MC andthat of a VC. Thus more than one charge source would need to be employedin the same Marx generator. Second, the VCs cannot provide flexiblecompensation. Only at a pre-set time interval a VC is switched on.Third, many VCs are needed for a Marx modulator with a long output pulsebecause the VC's storage energy is low and its compensation ability islimited by the low voltage. Fourth, the low charge voltage results inlarge ohmic loss due to increased charge current, thus diminishing theefficiency, or the energy utilization ratio. All of these problems notonly complicate the circuit design, but also increase the cost of thecircuitry with uncertain compensation results because a plurality of VCsin the compensation circuitry increase the parasitic inductance and maycause uncontrollable fluctuation during the flat top of the pulsedvoltage output. Furthermore, the footprint of the Marx modulator expandsas more VCs are added. Each VC is an integrated circuit which isutilized only once during one voltage pulse output.

The present invention provides a new way of compensating the voltagedroop of the MC banks of the Marx modulators by enhancing the electricenergy storage and utilization of the compensation cells (CCs), whilereducing the number of CC units in the Marx modulators, resulting insmaller footprint and lower fabrication cost. Further objectives andadvantages of the invention will become apparent from a consideration ofthe drawings and ensuing description.

SUMMARY OF THE INVENTION

Solid-state switches can turn on/off thousands of times or more persecond if their on/off time is on the order of microsecond or shorter.The present invention provides a high voltage compensation cell (HVCC)design for the voltage droop compensation of solid-state Marxmodulators, incorporating the advantages of the fast speed ofelectrically triggered solid-state switches which are easy to operateand have the ability of electrical current interruption, with additionalinductive component to resist any abrupt change of current in thecircuitries. The compensation voltage output by a HVCC is smoothlyraised to match the voltage droop of the MC bank of the Marx modulatorand maintain a flat voltage output of the entire Marx modulator. TheHVCCs designed with the scheme in the present invention have a chargevoltage as high as that of the MCs of the Marx modulators, thuseliminating the need for additional charge voltage source, as in thevernier regulator. The HVCCs have high stored electric energy, so asingle HVCC can actively compensate the voltage droop of the MC bank ofthe Marx modulator in multiple times and provide higher compensationvoltage.

The new compensation circuitry that utilizes HVCCs in series as a HVCCbank operates with an intelligent control system. An example of theintelligent control systems is a computer control system with thecapability of voltage variation detection and feedforward correction(see paper of D. Yu, Particle Accelerator Conference 1993). If thevoltage of the MC bank of the Marx modulator droops to a level that acompensation action is needed, the intelligent control system willtrigger the solid-state switches of a HVCC to release its electricenergy. The inductive components in the compensation circuitry of theHVCC will prevent its entire voltage from adding all at once to that ofthe MC bank of the Marx modulator, thus narrow the pulse flattopfluctuation range and smooth out the voltage compensation actions. Saidcontrollable compensation actions can be repeated many times as long asthe stored energy in the compensation circuitry remains sufficient.Using this multiple compensation principle, the number of CCs is reducedand the design of the compensation circuitry is simplified. The voltagedroop of the MC banks of the Marx modulators is controlled within therange required by their loads.

Two embodiments of the HVCC are disclosed in the present invention. Thefirst embodiment is a HVCC with a topology modified and improved fromthat of a MC of the Marx modulator. Two additional components, i.e. aninductor and a diode, are added in the HVCC for controlling thecompensation energy flow and smoothing the compensation voltage. Thesecond embodiment is a HVCC that utilizes a buck converter circuit,which is often used for DC-to-DC voltage conversion in circuit design.Both embodiments comprise inductive components, diodes, capacitors andfast speed solid-state switches, and are controlled by intelligentcontrol systems.

The present invention applies to designing a compensation circuitry oflong-pulse Marx modulators which are used by particle accelerators andradars, and Marx pulsers that output high voltage pulses used in weaponeffect simulators, fusion research devices, lasers etc. The inventionalso applies to a Marx pulser operating with a small load or outputtinga long pulse. The compensation circuitry comprising a HVCC bank that hasa plurality of HVCCs in series enables an entire Marx modulator tomaintain a constant voltage output. In addition to these applications,the compensation scheme in the present invention applies to low-voltagepulsers with several kilovolts or less, as the compensation circuitriescan be easily scaled down.

DESCRIPTION OF THE DRAWINGS

For a better understanding of the present invention and further featuresthereof, reference is made to the following descriptions which are to beread in conjunction with the accompanying drawings wherein.

FIG. 1 is a prior art compensation cell (CC), identical to a Marx cell(MC) topologically.

FIG. 2 a is the first embodiment of the present invention, and FIG. 2 bis the first embodiment with an additional solid-state switch forprotecting the load from arcing.

FIG. 3 a is the second embodiment of the present invention, and FIG. 3 bis the second embodiment with an additional solid-state switch forprotecting the load from arcing.

FIG. 4 is a schematic of a proof-of-principle experimental setup for thefirst embodiment.

FIG. 5 shows the compensation action observed when the first embodimentwas tested in the proof-of-principle experiment.

FIG. 6 a and FIG. 6 b illustrate the compensation action when the totalcapacitance of the MC bank was varied from 3 μf to 6 μf, respectively.

DESCRIPTION OF THE INVENTION

For compensating the voltage droop of a solid-state Marx modulator, a CCbank having a plurality of CCs in series is needed. The number of CCsthat are needed in a CC bank of a solid-state Marx modulator can bedetermined as follows. The energy stored in a CC bank should at leastmake up the energy difference between the energy absorbed by a Marxmodulator's load when the Marx modulator outputs an ideal voltage pulse,and the actual, decayed voltage pulse for which the Marx modulator isabsent of any CC bank in series of its MC bank. Based on this principle,the following calculations yield the number of CCs needed:

(1) Energy deposited on a Marx modulator's load when the Marx modulatorhas only a MC bank with no compensation

The voltage V(t) output by a MC bank having a total capacitance C and aload impedance R in series with the bank attenuates in time accordingto:

$\begin{matrix}{{{V(t)} = {V_{0}^{- \frac{t}{RC}}}},} & (1)\end{matrix}$

where V₀ is the initial output voltage amplitude of the MC bank, equalto the dc charge voltage times the number of the MCs erected, and t isdischarging time or pulse length. The output power P(t) of the MC bankdecays in a form of:

$\begin{matrix}{{P(t)} = {\frac{{V(t)}^{2}}{R}.}} & (2)\end{matrix}$

If E(t) is the total energy dissipated in the load R, then:

$\begin{matrix}{{E(t)} = {{\int_{0}^{t}{{P(t)}\ {t}}} = {\frac{1}{2} \times C \times {{V_{0}^{2}\left( {1 - ^{- \frac{2\; t}{RC}}} \right)}.}}}} & (3)\end{matrix}$

(2) Energy dissipation on a Marx modulator's load during an idealrectangular voltage pulse with compensation

For an ideal rectangular voltage pulse (amplitude of V₀), the energyE_(v)(t) of the pulse loss in the load with an impedance of R is:

$\begin{matrix}{{E_{r}(t)} = {\frac{V_{0}^{2}}{R} \times {t.}}} & (4)\end{matrix}$

(3) Energy stored in one CC or VC, E_(v)(t), is:

$\begin{matrix}{{{E_{v}(t)} = {\frac{1}{2} \times C_{v} \times V_{v}^{2}}},} & (5)\end{matrix}$

where C, is the capacitance and V_(v) is the charge voltage of the CC.(4) Minimum number of CCs

The electric energy stored in a CC bank should make up the differencebetween E_(r)(t) and E(t). Thus, the minimum number, N, of the CCs canbe calculated from the equation below:

N=(E _(r)(t)−E(t))/E _(v)(t).  (6)

From Equation 3 to 6, it is seen that:

N∝(V ₀ /V _(v))².  (7)

Thus the minimum number, N, of CCs is inversely proportional to theamplitude square of the charge voltage, V_(v), of the CCs. Increasingthe charge voltage reduces the number of CCs, thus helping to simplifythe Marx modulator and saving cost. In certain applications such as theInternational Linear Collider project, the flatness of an output voltagepulse of the Marx modulator must be within a very small range, e.g. 1%or less. This requires a very low charge voltage of a prior art CC,because the output voltage of the CCs, having an initial amplitudeequivalent to the charge voltage of the CCs, will superimpose on thetotal output voltage of the Marx modulator. Thus many CCs for the Marxmodulators are needed in this prior art scheme. The present inventionincorporates fast speed solid-state switches, inductors and diodes intoa HVCC to smooth the output voltage of the compensation circuit of theMarx modulators. It allows raising the charge voltage of a HVCC as highas that of the charge voltage of the MC. The HVCC circuit will regulateits stored electric energy before partially releasing it. This methodsignificantly enhances the HVCC's efficiency to compensate Marxmodulator's voltage droop while keeping the flattop fluctuation of theMarx modulator's output voltage pulse in a required small arrange. Ittherefore reduces the number of CCs utilized.

FIG. 2 a illustrates the first embodiment of the present invention ofthe high voltage compensation cell, or HVCC. The HVCC topology shown inFIG. 2 a includes HVCC main switch 32 with its isolated switch drive 40,HVCC charge switch 36 with its isolated switch drive 42, HVCC energystorage capacitor 34, HVCC bypass diode 38, compensation inductor 44,and compensation diode 46. All of the isolated switch drives in the HVCCaccept control signals from an intelligent control system of the Marxmodulator, such as a computer control system and/or a feedforwardsystem, which can detect the voltage variations on the Marx modulator'sload through devices such as a voltage divider parallel to or in seriesof the load. The intelligent control system of the Marx modulator is notincluded in the HVCC topology in this figure since it controls theentire Marx modulator, not only a cell of the modulator. An example ofthe intelligent control system used in the integrated Marx modulator canbe found in FIG. 4, where a single board computer is used as anintelligent control system. Compared to the topology of the MC or aprior art CC, two other important components are added in this HVCCtopology, i.e. compensation inductor 44 and compensation diode 46, bothof which are adopted for smoothing the compensation voltage abruptchange when HVCC main switch 32 is turned on, and for avoiding theinterruption of compensation function when HVCC main switch 32 is turnedoff. With the aid of compensation inductor 44, HVCC main switch 32 isturned on/off multiple times by the intelligent control system duringone voltage pulse output by the Marx modulator. The electric energystored in the HVCC energy storage capacitor 34 is released partly duringeach on time of HVCC main switch 32, therefore the HVCC performsmultiple times of compensation actions to the MC bank that is in serieswith it. Specifically, as the voltage pulse output by the Marx modulatordroops, HVCC main switch 32 is turned on immediately by the intelligentcontrol system of the Marx modulator. The voltage across HVCC energystorage capacitor 34 is added to the voltage of the MC bank in seriesgradually by means of the counteraction of compensation inductor 44.Once the output voltage of the entire Marx modulator recovers, HVCC mainswitch 32 is turned off, and the magnetic field energy stored incompensation inductor 44 continues to maintain the current through theinductor and the output voltage level of the MC bank, by outputting anequivalent voltage that we call post-compensation voltage to the priorcompensation voltage across said compensation inductor 44; and thecorresponding current under this voltage will go through compensationdiode 46 to continuously power the load of the solid-state Marxmodulator. The post-compensation voltage diminishes with time as thestored magnetic field energy is depleted, and the total voltage of theMarx modulator begins to droop again. When the total voltage reduces toa certain level, the compensation cycle is restarted over by theintelligent control system, as long as there is sufficient electricenergy stored in HVCC energy storage capacitor 34, to compensate thevoltage droop of the MC bank. Although the fall time of the voltagepulse output by the MC bank is affected by the inductance ofcompensation inductor 44, the compensation effect of the inductance isoutpaced by the faster compensation action. The value of the inductanceneeded is therefore correlated to the switching speed of the solid-stateswitch. The faster is the speed of the solid-state switch, the less isthe inductance of the HVCC needed. In summary, the HVCC having higherelectric energy storage is exploited in a method that compensates thevoltage droop of the MC bank of the solid-state Marx modulator inmultiple times during one voltage pulse of the modulator.

FIG. 2 b describes an improvement of the compensation circuit in FIG. 2a. A third solid-state load protection switch 48 with its isolated gatedrive 50 is added in the circuit for protecting the load of the Marxmodulator, which may be an rf load such as a klystron. Load protectionswitch 48 is turned on when the HVCC begins to compensate, and turnedoff rapidly to cut off the current if there is load arcing, or it isturned off after the HVCC completes compensation. The switch does nototherwise contribute to normal compensation functions.

FIG. 3 a describes the second embodiment of the present invention.Compared with the first embodiment shown in FIGS. 2 a and 2 b, thesecond embodiment has similar topology but one more capacitor, which isdirect compensation capacitor 52. The first embodiment is in fact aspecial case of the second one, with direct compensation capacitor 52 inthe second embodiment having a value of zero. The purpose of directcompensation capacitor 52 is to alleviate the current load forcompensation inductor 44 and compensation diode 46, because the currentof the MC bank will pass through direct compensation capacitor 52.

The second embodiment can be viewed in two separate parts (see FIG. 3b). The left part in FIG. 3 b is a buck converter. When this part worksin switching mode power supply (SMPS), it has a variable output voltagethat is related to the voltage of HVCC energy storage capacitor 34 andthe duty cycle of HVCC main switch 32. However, the SMPS mode is notused in compensation actions. Instead, in the present invention, HVCCmain switch 32 is triggered by said intelligent control system throughits isolated switch drive 40 whenever compensation is needed. HVCCenergy storage capacitor 34 is charged to a high voltage, which can beidentical to that of MC, so that it stores sufficient electric energy tobe used in the ensuing compensation actions. The right part in FIG. 3 bis the same as the topology of a MC, where direct compensation capacitor52, in the position of energy storage capacitor 14 in FIG. 1, receivesthe regulated compensation energy from the left part and thus functionsin a similar manner as said energy storage capacitor 14, with thedistinction that voltage across direct compensation capacitor 52 willincrease, not drop, along with time during compensation. Thecompensation energy flux, and thus the voltage of direct compensationcapacitor 52, is adjusted through the triggering of HVCC main switch 32.Thus, the left part of the embodiment imparts electric energy to theright part under regulation so that the right part increases its outputvoltage gradually to compensate the voltage droop of the MC bank inseries.

Preliminary Experiments

Low-voltage experiments were performed for the compensation circuitry ofthe first embodiment (see FIG. 2 a), in conjunction with a single Marxmain cell. The experimental purpose was to prove the feasibility of theHVCC design scheme in the present invention, i.e. multiple compensationsregulated by the solid-state switch and the inductor. For simplicity,only one HVCC was used in the test. The charge voltage of the HVCC wasthe same as that of the MCs. The capacitance of the HVCC was 30 μF. AnMC bank (total in series capacitance of 3 μf) equivalent to 12 MCs inseries was used. The MC bank was in series of the HVCC. Thirteen diodes62 were used in charge circuits for both the MCs and the HVCC; the valuefor the charge current limited resistor 66 was 3 kΩ. The experimentalsetup is shown in FIG. 4. In the tests, all of the MCs and the HVCCadopted IGBT switches. The IGBT switches (rated at 100V) were driven byisolated switch drive circuits and controlled by a single-boardcomputer. A voltage divider that was in series of the load was utilizedto monitor the voltage change on the load and the voltage signal of thevoltage divider was sent to the computer for the purpose of controllingHVCC main switch 32 to start the compensation actions.

FIG. 5 shows the compensation voltage curve, i.e. output by the singleHVCC and regulated by the computer, observed in the experiments. Theoverall voltage pulse was 1.7 ms long and the pulse amplitude in thebeginning was ˜62 V high. The horizontal axis in FIG. 5 is time (same inthe following FIGS. 6 a and 6 b). The compensation voltage output by theHVCC (see Curve 2 in FIG. 5) made small ripples on the overall voltagepulse (see Curve 1 in FIG. 5) and maintained the overall voltage pulselevel up to t=500 μs. After that, the overall voltage pulse decayed asthe stored energy of the HVCC was exhausted, and from that time the HVCCmain switch 32 was turned on all the way till the end of the voltagepulse.

Further experiments were conducted to obtain the relationship of theseries capacitance of the MC bank to that of HVCC. Here we define theadequate compensation period, t_(a), which refers to the time from theinitial trigger on the isolated switch drive 40 of HVCC main switch 32to the instant that the energy in the HVCC is no longer sufficient tocompensate the voltage output by the MC bank (the voltage began to droopall the way from that point on). At time t_(a), HVCC main switch 32 wasturned on and remained on. From the equations above, we deduce that theadequate compensation period t_(a) should become longer when the seriescapacitance of the MC bank increases because less energy is needed tocompensate the voltage droop. We have observed this phenomenon duringour experiments when we varied the series capacitance of the MC bank andkept other experimental conditions nearly the same. It was shown thatt_(a) was around 240 μs for the series capacitance of the MC bank at 3μF (see FIG. 6 a, where the initial voltage amplitude is ˜72 V and wasthe same for FIG. 6 b) and around 400 μs when the value was changed to 6μF (see FIG. 6 b). The observation agreed well with the prediction ofthe equations above.

While the invention has been described with reference to its preferredembodiments, those skilled in the art will understand that variouschanges may be made and equivalents may be substituted for elementsthereof without departing from the true spirit and scope of theinvention. In addition, many modifications may be made to adapt aparticular situation or material to the teachings of the inventionwithout departing from its essential teachings.

1. A high voltage compensation cell of solid-state Marx modulator thatis capable of being charged to the same high voltage level of a Marxcell, storing electric energy for compensating the voltage droop of thesolid-state Marx modulator with high power, long pulse output. Said highvoltage compensation cell comprises: capacitor(s) for charging to thehigh voltage that is at the same level of a Marx cell so that said highvoltage compensation cell can store a large amount of electric energyfor compensating voltage drooping of the Marx modulator output;solid-state switches for regulating the flow of compensation current outfrom the said capacitor(s) and therefore controlling the fluent of thehigh voltage electric energy stored so that multiple compensations tothe voltage droop of the Marx modulator can be realized from a singlesaid high voltage compensation cell; inductors for smoothing the voltagefluctuations of the Marx modulator when voltage compensations from saidhigh voltage compensation cell are performed to counteract the voltagedroop of said Marx modulator; diodes for stipulating the flow directionof compensation current; an intelligent control system for triggeringsaid solid-state switches for regulating the compensation current tomake multiple compensation actions.
 2. Said high voltage compensationcell of claim 1 in which a method to use inductors and diodes or thecombination of inductors, capacitors and diodes in a compensation cellwhich will form a buck converter structure to regulate the electricenergy fluent, under the control of intelligent control system, andsmooth the flattop fluctuations of voltage pulse output by solid-stateMarx modulators when the pulse is being compensated.
 3. A high voltagecompensation cell in which a method to use high voltage capacitors,having identical or higher voltage rating than the ones used in Marxcells and being charged to that voltage level of the Marx cells, isemployed by the high voltage compensation cell to store high electricenergy so that the high voltage compensation cell has strongcompensation ability.
 4. A method of making one single high voltagecompensation cell to have multiple compensations to a solid-state Marxmodulator during one output voltage pulse of the Marx modulator.